The Nikkei ended 1.45% lower at 42,649.26, snapping a six-session rally.
The broader Topix fell 1.1% to 3,057.95, also snapping a six-session winning streak.
Shares of chip-testing equipment maker Advantest lost 4.64% to become the biggest drag for the Nikkei.
Among gainers, technology investor SoftBank Group rose 4.4%.
Of the more than 1,600 stocks trading on the Tokyo Stock Exchange's prime market, 28% rose, 68% fell, and 3% closed flat.
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